Department of Mechanical Engineering

Micro/Nano Systems

The Micro/Nano Systems Group consists of faculty specializing in micro/nano scale systems design, fabrication, integration and performance/reliability analysis. 

Highly interdisciplinary in nature, our research is involves many different areas of micro/nanotechnology that have concepts rooted in Mechanical Engineering including design, solid and fluid mechanics, material behavior and surface/interface phenomena. 

Experimental and simulative research strategies are focused on understanding the physical principles specific to small scale phenomena and developing science and technology that allow us to produce targeted components and systems for biological, sensing, manufacturing and materials applications.

Cross-disciplinary and industrial collaborations are a strong feature of our research program.

What are Micro/Nano Systems?

Using established silicon microfabrication technology, Micro Electro Mechanical Systems (MEMS or microsystems) research and technology burgeoned in the late 80s and can today fabricate and integrate mechanical components on the microscale (1 micron is one hundredth the width of your hair).

Very recently, people have begun to challenge controlling matter on the nanoscale - one thousand times smaller than the microscale.  Called nanotechnology, this bold and innovative effort is rapidly opening up a vast array of possibilities in understanding and providing new technologies for handling chemical, electrical, and mechanical issues on a scale approaching the molecular level. 

Micro/nano technologies will dominate the engineering and scientific activities in the foreseeable future.

Impacts and Applications of Micro/Nano Systems

Tiny MEMS sensors and actuators together with powerful semiconductor technology will enable intelligent and economical integrated systems for a variety of applications. 

Examples of high impact systems currently in the market include air-bag deployment sensors in automobiles optical telecommunication switches and high definition displays. Although nanotechnology is in its infancy, examples of commercial products include spill-repellant clothing, drug and nanocomposite materials and coatings for stronger, lighter parts.

With the integration of nanomaterials, nanoelectronics, nano-optics and nanochemicals you will see improved product performance, cheaper production costs and overall customer satisfaction.

Expect more exciting and cutting edge micro/nano systems to become widespread soon in commercial, defense and medical applications in the future.

Research Labs:

Faculty Members: