Department of Mechanical Engineering

“Mechanical and Morphological Effects of Galvanic Corrosion on Structural Polysilicon”

 

Mechanical Engineering Seminar

Friday, November 17, 2006
12:10 p.m. – 1:00 p.m.
1028 H. M. Black Engineering Bldg.

Conrad R. Stoldt
Department of Mechanical Engineering
University of Colorado at Boulder

“Mechanical and Morphological Effects of Galvanic Corrosion on Structural Polysilicon”

Abstract
The study of galvanic corrosion on polycrystalline silicon (polySi) microstructural components is a new and necessary direction for small-scale device design, fabrication, and implementation. Study is needed not only because the previously unforeseen mechanical and electrical effects of corrosion are shown to be significant to device performance, but also because the related technology is currently being commercialized as well as integrated into many fields of study. As is evidenced by previous investigations, the unforeseen effects of chemical post-processing on micro-electro-mechanical structures are now proving to be a key contributor to the Micro-Electro-Mechanical Systems (MEMS) reliability problem. This work aims to link the effects of galvanic corrosion on thin film polySi during chemical post-processing to observe MEMS reliability problems such fatigue, mechanical wear, and catastrophic failure.For questions, contact Charlene Kravinsky (4-1423  cakravi@iastate.edu)

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